JOURNAL

Layanan journal yang disediakan oleh Perpustakaan Universitas Gunadarma

INFLUENCE OF SUBSTRATE TEMPERATURE ON STRUCTURAL, ELECTRICAL AND OPTICAL PROPERTIES OF ZnO:AI THIN FILMS

Judul Artikel:INFLUENCE OF SUBSTRATE TEMPERATURE ON STRUCTURAL, ELECTRICAL AND OPTICAL PROPERTIES OF ZnO:AI THIN FILMS
Judul Terbitan:Atom Indonesia
ISSN:0126-1568
Bahasa:ENG
Tempat Terbit:Jakarta
Tahun:0000
Volume:Vol. 35 Issue 2 0000
Penerbit:BATAN Puspitek Serpong
Frekuensi Penerbitan:2x per Tahun
Penulis:Sudjatmoko, Wirjoadi, B. Siswanto
Abstraksi:INFLUENCE OF SUBSTRATE TEMPERATURE ON STRlJCTlJRAL, ELECTRICAL AND OPTICAL PROPERTIES OF ZnO:AI THIN FILMS. Transparent and conductive aluminium-doped zinc oxide thin films have been prepared by dc magnetron sputtering technique using targets composed of ZnO and aluminium. Polycrystalline ZnO:AI films were deposited onto a heated glass substrate. Surface morphology and crystalline structure as well as optical and electrical properties of the deposited films were found to depend directly on substrate temperature. From optical and electrical analysis it was observed that optical transmittance and conductivity of the ZnO:AI transparent conductive oxide films increased when the deposition temperature was raised from 200 to 400°C. Films grown on substrates heated at 300 °C showed a high conductivity value of 0.2 x 102 n-1cm-1 and a visible transmission of about 80%. The growth of ZnOAI thin films on the surface of glass substrate at temperatures of 300°C and aluminium doping levels of 0.9 at.% were the best to attain ZnO:AI films with optical and structural qualities as required for solar cell applications, as a window material in antireflection coatings or optical filters.
Kata Kunci:polycrystallinc; morphology; conductivity; transmittance
Lokasi:P115
Terakreditasi:belum